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BARRIER COATINGS

 

An important result of using HiPIMS is that a high film density without pinholes can be synthesized even without using a high substrate bias voltage. This opens up the possibility to create high-quality diffusion barriers for e.g. solar cells and fuel cells.

  • Good coverage even on rough substrate materials such as steel
  • Flexible choice of material: Ta, TaN, ZrN etc.
  • Phase-tailoring (such as achieving alfa-Ta at room temperature) leads to improved performance
   
  

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