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ITO COATINGS

 

We have developed a robust reactive HiPIMS process to grow ITO using an indium-tin target in an oxygen-argon atmosphere. We are unique in that we are offering a reactive HiPIMS process for ITO.

  • Proven better coverage of complex-shaped surfaces: coat nano-structures
  • Room temperature process
  • Reactive process = higher deposition rate
  • Decreased lateral resistivity by decreased intercolumnar porosity
  • Decreased surface roughness
   
  

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