Features
- Hollow cathode design for maximized target material ionization and nanoparticle growth
- Higher nanoparticle growth rates compared to magnetron based sources
- Easily interchangeable hollow cathode targets
- Nanoparticle size control through several parameter options
- Well investigated and documented parameter studies
- Tested using a range of target materials
- Nanoparticles obtain a net negative charge which makes electrical guidance to preferential spots possible