Features
- Stable and robust
- Stable and robust discharge process – Constant voltage and no unwanted oscillations.
- Externally triggered
- Externally triggered and possible to control through master-slave configuration – multiple power supplies.
- Reactive process control
- Reactive HiPIMS process control can be implemented upon request. This feature allows:
- Stable operation during the transition mode
- Wide process window of reactive gas flow with maintained stoichiometric composition
