IonMeter
Our IonMeter is based on the proven quartz crystal microbalance (QCM) technique for measuring deposition rates in real-time during process. As well as the ionization fraction in the deposition flux by applying a bias voltage to the crystal sensor. The IonMeter is equipped with magnetic shielding to avoid plasma electrons from interfering with the diagnostics, while at the same time not blocking ions nor neutrals.
FEATURES
- Absolute quantification of the ionization fraction in the deposition flux
- Real-time measurements in situ during process
- Only considers film-forming material
- Magnetic shielding from electrons is much more robust compared to a solution using grids
APPLICATIONS
- Optimization of ionized flux fraction in Ionized Physical Vapor Deposition (IPVD) processes
- Process stabilization by monitoring and mitigating drift in ionization over time
- Tune coating parameters, such as stress, hardness, and conductivity, by monitoring and controlling ionization
- Deposition system design optimization by spatially mapping out ionization and deposition
- System design optimization, you want it evenly distributed in the space
- PVD source and magnet pack design optimization in situ during process.
Download data sheet here.
